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Dec 26 2017

Silicon-Carbide Coating Protects Flow and Liquid Level Sensor Modules

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It’s reported on Nov. 15th 2017 that the FS1012 and FS2012 MEMS-based flow sensor modules from Integrated Device Technology (IDT) are now being shipped by distributor Mouser Electronics. The solid-state sensor element design eliminates cavities and diaphragms typically found in similar devices and features a protective silicon-carbide coating, making it a robust and reliable flow sensor element compatible with food-grade applications.


Body

FS1012 and FS2012 MEMS-based flow sensor modules from Integrated Device Technology (IDT) are now being shipped by distributor Mouser Electronics. The solid-state sensor element design eliminates cavities and diaphragms typically found in similar devices and features a protective silicon-carbide coating, making it a robust and reliable flow sensor element compatible with food-grade applications. The solid thermal isolation of the active MEMS sensing element along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability.


FS1012,Calibrated liquid flow sensor Liquid Level Sensors,Analog Liquid Level Sensors


The FS1012 is an uncalibrated standalone flow sensor module with a supply voltage of 3V to 5V and an analogue millivolt output. The FS2012 is a fully calibrated version of the FS1012 flow sensor, featuring a digital I2C output and analog 0V to 5V output plus temperature compensation circuitry for plug-and-play usage in complex digital systems. Meanwhile,FS2012 module offers accuracy down to 2% of the measurement reading, providing high-accuracy in high- or low-flow situations using the same sensor module.


With no moving parts and no fragile diaphragm over a cavity, the sensors eliminate clogged sensor elements and fluid pressure sensitivity, provide excellent shock resistance, and prevent chemicals from damaging the sensor element. 

What’s more, The modules are ideal for use in medical, industrial, and food-grade consumer applications where reliability, robustness, and protection against cross-contamination are critical factors.


Features

  • Measures gas or liquid mediums

  • Robust solid isolation technology

  • No cavity in MEMS sensor to cause clogging

  • Resistant to vibration and pressure shock

  • Low power application

  • Fast response time

  • Millivolt output

  • Heater supply voltage: 3V to 5V DC

  • Operating temperature range: 0°C to +85°C


FS1012 Products Options


FS1012-1001-LQ

Active

Liquid, 0 to 0.5 SLPM

BD0

0 to 85°C

Availability

FS1012-1002-LQ

Active

Liquid, 0 to 1.0 SLPM

BD0

0 to 85°C

Availability

FS1012-1020-NG

Active

Gas, 0 to 2 SLPM

BD0

0 to 85°C

Availability

FS1012-1100-NG

Active

Gas, 0 to 10 SLPM

BD0

0 to 85°C

Availability


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